UNIVERSITÀ DI PARMA
DIPARTIMENTO DI SCIENZE MATEMATICHE, FISICHE E INFORMATICHE

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====== SEM-FEG Zeiss SUPRA™ 40 ======

The scanning electron microscopy technique is versatile and non-destructive, it reveals the morphology
and the composition of a lot of materials. 
The ZEISS SUPRA™ 40 is a SEM-FEG capable of high quality semples imaging.
Perfect for investigateing nanosystems, it offers high stability and a large (130 mm) versatile specimen holder. 
Meanwhile, the GEMINI FESEM column utilised on the SUPRA™ 40 has an extremely low magnetic field
outside the objective lens enabling investigation of magnetic materials and devices. 
A field-emission cathode in the electron gun provides improved spatial resolution and minimized sample charging/damage.

**Performances:**

__Nominal resolution:__ 1.5 nm at 10 KV and WD= 2mm

__Acceleration voltage:__ 0.1 - 30 KV

__Probe current:__ 4 pA-10 nA

__Magnification:__ 12 - 900,000X

__Working distance:__ it ranges from 1 to 50 mm, depending on the operating conditions 

The sample holder can host nine stubs. Each stub can contain samples of about 1 cm2.

The SEM-FEG is equipped with X-Act [[lmn:microanalisi|microanalysis]].

====== Resources ======

You can find detailed description in {{lmn:brochure.pdf|SUPRA™ 40 Brochure}}